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The performance assessment of sputter ion pumps: D Andrew,Vacuum16 (12), Dec 1966, 653–657

Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
146 KB
Volume
17
Category
Article
ISSN
0042-207X

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📜 SIMILAR VOLUMES

The performance assessment of sputter io
The performance assessment of sputter ion pumps
✍ D Andrew 📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 762 KB

The design and operating technique for an apparatus for the measurement of pump speeds of sputter ion pumps in the range 10 to 100 litres/sec is described. In spite of the precautions taken a large variation in the measured value is observed. The speed of a sputter ion pump is found to depend both o