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The observation of pseudodiffusion of nickel in single-crystal silicon by in-depth Auger electron spectroscopy

✍ Scribed by G.L.P. Berning; K.H. Yoon; G. Lewis; S. Sinharoy; L.L. Levenson


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
211 KB
Volume
45
Category
Article
ISSN
0040-6090

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In-depth composition profile of anodic o
✍ S. Matsuzawa; N. Baba; S. Tajima πŸ“‚ Article πŸ“… 1979 πŸ› Elsevier Science 🌐 English βš– 286 KB

In-depth composition profiles of the an&c oxide films grown on Al (1 I1 ), (I 10) and (100) single crystal electrodes in ammonium borate were studied by Auger electron spectroscopy with Ar ion etching. The oxide film had the composition of Ai,O, as referenced to an authentic a-Al,O, single crystal.