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He+ backscattering and Auger electron spectroscopy study of the ion-induced modification of copper films deposited on single-crystal silicon

✍ Scribed by P. Baeri; G. Luzzi; L. Papagno


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
560 KB
Volume
56
Category
Article
ISSN
0040-6090

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