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In situ Auger electron spectroscopy investigation of the chemical bonding of ion-beam-deposited silicon nitride

✍ Scribed by D. Bouchier; A. Bosseboeuf

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 917 KB
Volume: 139
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90052-0

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