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The Measurement of Thin Film Thickness by Interferometry

✍ Scribed by TOLANSKY, S.


Book ID
115377436
Publisher
Optical Society of America
Year
1951
Weight
717 KB
Volume
41
Category
Article
ISSN
0030-3941

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Measurement of thin film thickness by el
✍ Canan KaraaliogΜƒlu; Yani Skarlatos πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 362 KB

The surface profile of an Al thin film and its thickness have been observed by electronic speckle pattern interferometry (ESPI). The Michelson interferometer was used as our basic interferometric system to obtain interference fringes on a CCD camera. These interference fringes, arising from the path