Measurement of thin film thickness by el
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Canan Karaaliog̃lu; Yani Skarlatos
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Article
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2004
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Elsevier Science
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English
⚖ 362 KB
The surface profile of an Al thin film and its thickness have been observed by electronic speckle pattern interferometry (ESPI). The Michelson interferometer was used as our basic interferometric system to obtain interference fringes on a CCD camera. These interference fringes, arising from the path