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Fourier transform method for measurement of thin film thickness by speckle interferometry

✍ Scribed by Karaaliog̃lu, Canan; Skarlatos, Yani


Book ID
115483638
Publisher
The International Society for Optical Engineering
Year
2003
Tongue
English
Weight
465 KB
Volume
42
Category
Article
ISSN
0091-3286

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Measurement of thin film thickness by el
✍ Canan Karaaliog̃lu; Yani Skarlatos 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 362 KB

The surface profile of an Al thin film and its thickness have been observed by electronic speckle pattern interferometry (ESPI). The Michelson interferometer was used as our basic interferometric system to obtain interference fringes on a CCD camera. These interference fringes, arising from the path