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The influence of the chemical composition of silicon nitride films on their thermal oxidation parameters

✍ Scribed by L.V. Chramova; T.P. Smirnova; B.M. Ayupov; V.I. Belyi

Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
403 KB
Volume
78
Category
Article
ISSN
0040-6090

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✍ J.J Polling; A Charlesby πŸ“‚ Article πŸ“… 1954 πŸ› Elsevier Science βš– 946 KB

Changes in the thermal oxidation of zirconium due to the presence of an initial electrolyticallyformed oxide layer are studied. The increase in thickness of the oxide on heating is measured optically and gravimetrically. The effect of the initial layer is the same as if it had been produced thermall