✦ LIBER ✦

Conduction mechanism of oxide-nitride-oxide film formed on the rough polycrystalline silicon surface

✍ Scribed by Naoto Matsuo; Akio Sasaki

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 485 KB
Volume: 39
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(95)00145-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Anomalies in the growth of anodic oxide

Anomalies in the growth of anodic oxide films on rough surfaces

✍ L. Young 📂 Article 📅 1957 🏛 Elsevier Science ⚖ 775 KB

During the growth of anodic oxide films, surface irregularities of the scale of the thickness of the oxide film are believed to be flattened. The original inner layers of the oxide (new layers are formed on the outside, since metal ions move) are, therefore, constrained to cover a progressively smal

The influence of the chemical compositio

The influence of the chemical composition of silicon nitride films on their thermal oxidation parameters

✍ L.V. Chramova; T.P. Smirnova; B.M. Ayupov; V.I. Belyi 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 403 KB

Comparison of the Dynamic Stress Breakdo

Comparison of the Dynamic Stress Breakdown between Oxide and Oxy-Nitride Thin Films on Silicon

✍ Novkovski, N. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 53 KB 👁 2 views

Growth of an oxide film on a clean silic

Growth of an oxide film on a clean silicon surface and the kinetics of its evaporation

✍ A.A. Frantsuzov; I.I. Makrushin 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 265 KB

Measurements of the thickness of thin ox

Measurements of the thickness of thin oxide films and thin nitride films on silicon by infra-red absorption

✍ J.V. Boal; J.T. Edmond; B. Lawrenson 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 242 KB

Effects of wet oxidation on the electric

Effects of wet oxidation on the electrical properties of sub-10 nm thick silicon nitride films

✍ Eun Gu Lee; Jae Sung Roh; Ho Bin Im 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 544 KB