Comparison of the Dynamic Stress Breakdown between Oxide and Oxy-Nitride Thin Films on Silicon

✍ Scribed by Novkovski, N.

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 53 KB
• Volume: 182
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200012)182:2<r8::aid-pssa99998>3.0.co;2-p