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The influence of strain and mosaic structure on electrical and optical properties of GaN films on sapphire substrates

✍ Scribed by A.E. Wickenden; W.B. Alexander; D.D. Koleske; J.A. Freitas Jr.


Book ID
108342288
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
315 KB
Volume
170
Category
Article
ISSN
0022-0248

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of