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The Influence of Defects on the Morphology of Si (111) Etched in NH 4 F

✍ Scribed by Zhou, Hui; Fu, Joseph; Silver, Richard M.

Book ID: 126201019
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 935 KB
Volume: 109
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp0524072

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