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Etching of n-Si(111) in 40% NH4F Solution Investigated by OCP, In Situ EC-STM, and ATR-FTIR Spectroscopic Methods

โœ Scribed by Bae, S.-E.; Yoon, J.-H.; Lee, C.-W.J.


Book ID
127211420
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
330 KB
Volume
112
Category
Article
ISSN
1932-7447

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Etching processing of Si(111) and Si(100
โœ Masanori Nakamura; Moon-Bong Song; Masatoki Ito ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 512 KB

situ real-time measurements of etching processes by infrared total reflection spectroscopy were carried out for the first time on Si(ll1) and Si(100) surfaces in ammonium fluoride solution. The absorption bands became broad by the interaction between terminal hydrides with water molecules. On Si(lll