The impact on in-situ-hydrogen-plasma treatment for zinc oxide plasma enhanced atomic layer deposition

✍ Scribed by Kwon, Jung-Dae; Lee, Jae-Won; Nam, Kee-Seok; Kim, Dong-Ho; Jeong, Yongsoo; Kwon, Se-Hun; Park, Jin-Seong

• Book ID: 125434799
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 657 KB
• Volume: 12
• Category: Article
• ISSN: 1567-1739
• DOI: 10.1016/j.cap.2012.02.044