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The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si

✍ Scribed by P. G. Coleman; R. E. Harding; G. Davies; J. Tan; J. Wong-Leung

Publisher
Springer US
Year
2006
Tongue
English
Weight
448 KB
Volume
18
Category
Article
ISSN
0957-4522

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