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7257. Vacancy-type defects in Si+-implanted GaAs and its effects on electrical activation by rapid thermal annealing: J-L Lee et al,J Appl Phys, 67, 1990, 6153–6158


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
155 KB
Volume
42
Category
Article
ISSN
0042-207X

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