✦ LIBER ✦

The fabrication and the reliability of poly-Si MOSFETs using ultra-thin high-K/metal-gate stack

✍ Scribed by Lee, M.H.; Chen, K.-J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The fabrication and dry etching of poly-

✍ Yongliang Li; Qiuxia Xu 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 459 KB

The Improvement of High-$k$/Metal Gate p

✍ Yeh, Wen-Kuan; Chen, Yu-Ting; Huang, Fon-Shan; Hsu, Chia-Wei; Chen, Chun-Yu; Fan 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 719 KB

The electrical and physical analysis of

✍ Chihoon Lee; Sang Yong No; Da Il Eom; Cheol Seong Hwang; Hyeong Joon Kim 📂 Article 📅 2005 🏛 Springer US 🌐 English ⚖ 186 KB

Generic reliability of the high-conducti

📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 140 KB