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The electrical and physical analysis of Pt gate/Al2O3/p-Si (100) with dual high-k gate oxide thickness for deep submicron complementary metal-oxide-semiconductor device with low power and high reliability

✍ Scribed by Chihoon Lee; Sang Yong No; Da Il Eom; Cheol Seong Hwang; Hyeong Joon Kim


Book ID
107453487
Publisher
Springer US
Year
2005
Tongue
English
Weight
186 KB
Volume
34
Category
Article
ISSN
0361-5235

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