✦ LIBER ✦
The fabrication and dry etching of poly-Si/TaN/Mo gate stack in the metal inserted poly-Si stack structure
✍ Scribed by Yongliang Li; Qiuxia Xu
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 459 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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