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The energy distribution of ions bombarding electrode surfaces in rf plasma reactors

✍ Scribed by Metze, A.; Ernie, D. W.; Oskam, H. J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Energy distribution of bombarding ions i

✍ Buzzi, F L; Ting, Y-H; Wendt, A E 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 495 KB

Modeling of the sheath and the energy di

✍ Edelberg, Erik A.; Aydil, Eray S. 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 553 KB

Calculation of ion bombarding energy and

📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 140 KB

Calculation of Ion Bombarding Energy and

✍ Tsui, R. T. C. 📂 Article 📅 1968 🏛 The American Physical Society 🌐 English ⚖ 718 KB

Distribution of ion energies incident on

✍ Kushner, M. J. 📂 Article 📅 1985 🏛 American Institute of Physics 🌐 English ⚖ 963 KB

On the effect of low-energy ion bombardm

✍ E. Occhiello; F. Garbassi; J. W. Coburn 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 481 KB