✦ LIBER ✦
Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements
✍ Scribed by Edelberg, Erik A.; Aydil, Eray S.
- Book ID
- 126842441
- Publisher
- American Institute of Physics
- Year
- 1999
- Tongue
- English
- Weight
- 553 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.371446
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