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Energy distribution of bombarding ions in plasma etching of dielectrics

✍ Scribed by Buzzi, F L; Ting, Y-H; Wendt, A E

Book ID: 120041487
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 495 KB
Volume: 18
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/18/2/025009

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## Nature of physical problem The code E-DEP-1 calculates the distribution of energy deposited into elastic collisions for a beam of heavy ions coming to rest in an amorphous target material of up to six atomic components. ## Method of solution The calculation is based on the approximation of K