✦ LIBER ✦
Arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing
✍ Scribed by Patterson, M M; Chu, H-Y; Wendt, A E
- Book ID
- 119974482
- Publisher
- Institute of Physics
- Year
- 2007
- Tongue
- English
- Weight
- 402 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0963-0252
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