✦ LIBER ✦

A plasma-based technique for controlled low energy ion bombardment of dielectric surfaces

✍ Scribed by D. Martin; H. Oechsner

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 466 KB
Volume: 59
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90090-b

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