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Calculation of ion bombarding energy and its distribution in rf sputtering

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📜 SIMILAR VOLUMES

1217. Calculation of ion bombarding ener

📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 141 KB

Angular distributions of sputtered Mo an

✍ B. Emmoth; Th. Fried; M. Braun 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 693 KB

Adaptation of a program for depth distri

✍ Irwin Manning; Mervine Rosen; J.E. Westmoreland 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 217 KB

## Method of solution Moments of the range distribution already calculated iF a sub-:outine of E-DEP-I are combined to obtain the tatol ~l range.

Sputtering of titanium carbide coatings

✍ M. Kaminsky; R. Nielsen 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 431 KB

Determination of ion fraction and energy

✍ Alan R. Krauss; Dieter M. Gruen 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 588 KB

Influence of the electron structure of s

✍ A.G. Koval' 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 140 KB