✦ LIBER ✦
1217. Calculation of ion bombarding energy and its distribution in rf sputtering: R T C Tsui, Phys Rev, 168 (1), 5th April 1968, 107–113
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 141 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0042-207X
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