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The effects of model parameter variations on high-fluence ion implantation

✍ Scribed by G Carter; MJ Nobes; IV Katardjiev; I Abril; A Gras-Marti; JJ Jimenez-Rodriguez; JA Peinador

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
755 KB
Volume
44
Category
Article
ISSN
0042-207X

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