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Effect of fluence on the lattice site of implanted Er and implantation induced strain in GaN

✍ Scribed by U. Wahl; B. De Vries; S. Decoster; A. Vantomme; J.G. Correia

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 409 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.043

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