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High fluence effects on ion implantation stopping and range

✍ Scribed by S. Selvi; Z. Tek; A. Öztarhan; N. Akbaş; I.G. Brown

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 121 KB
Volume: 229
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.11.015

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