✦ LIBER ✦
Atomic mixing effects on high fluence Ge implantation into Si at 40 keV
✍ Scribed by A. Gras-Marti; J.J. Jimenez-Rodriguez; J. Peon-Fernandez; M. Rodriguez-Vidal; N.P. Tognetti; G. Carter; M.J. Nobes; D.G. Armour
- Publisher
- Elsevier Science
- Year
- 1982
- Weight
- 190 KB
- Volume
- 194
- Category
- Article
- ISSN
- 0167-5087
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