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The effects of fluorine passivation on polysilicon thin-film transistors

✍ Scribed by Horng Nan Chern; Chung Len Lee; Tan Fu Lei

Book ID: 114535695
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 498 KB
Volume: 41
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.285019

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