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Investigations on the quality of polysilicon film-gate dielectric interface in polysilicon thin film transistors

✍ Scribed by Ji-Ho Kung; Miltiadis K. Hatalis; Jerzy Kanicki

Book ID: 107864099
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 853 KB
Volume: 216
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90883-d

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