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Hydrogenation effects on polysilicon thin-film transistor structures

✍ Scribed by Hatalis, M.K.; Kung, J.H.; Kanicki, J.

Book ID: 114534927
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 136 KB
Volume: 39
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.163533

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