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The effect of thermal treatments on the local geometry around indium in In and In + C high dose implanted Si

✍ Scribed by F. d’Acapito; Y. Shimizu; S. Scalese; M. Italia; P. Alippi; S. Grasso

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
348 KB
Volume
253
Category
Article
ISSN
0168-583X

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