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The effect of substrate bias in amorphous carbon films prepared by magnetron sputtering and monitored by in-situ spectroscopic ellipsometry

✍ Scribed by Gioti, M.; Logothetidis, S.


Book ID
121370554
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
586 KB
Volume
7
Category
Article
ISSN
0925-9635

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