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Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

✍ Scribed by Van Bui, H.; Groenland, A. W.; Aarnink, A. A. I.; Wolters, R. A. M.; Schmitz, J.; Kovalgin, A. Y.

No coin nor oath required. For personal study only.

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