Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films

✍ Scribed by D. Schmidt; S. Strehle; M. Albert; W. Hentsch; J.W. Bartha

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 662 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.09.006