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The effect of post-annealing under CdCl2atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering

โœ Scribed by Shenghao Wang; Jingquan Zhang; Bo Wang; Lianghuan Feng; Yaping Cai; Lili Wu; Wei Li; Zhi Lei; Bing Li


Publisher
Springer US
Year
2009
Tongue
English
Weight
404 KB
Volume
21
Category
Article
ISSN
0957-4522

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