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Effect of post-deposition annealing temperature on CeO2 thin film deposited on silicon substrate via RF magnetron sputtering technique

✍ Scribed by Soo Kiet Chuah; Kuan Yew Cheong; Zainovia Lockman; Zainuriah Hassan

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 941 KB
Volume: 14
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2011.01.007

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