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The effect of nitrogen incorporation on surface properties of silicon oxynitride films

โœ Scribed by Jongin Hong; Yunseok Kim; Hanjong Paik; Kwangsoo No; Jennifer R. Lukes


Book ID
112182766
Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
621 KB
Volume
3
Category
Article
ISSN
1862-6254

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