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Effect of nitrogen doping on nanomechanical and surface properties of silicon film

✍ Scribed by Te-Hua Fang; Win-Jin Chang; Shao-Hui Kang; Jia-Hung Liou

Book ID
108079214
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
740 KB
Volume
9
Category
Article
ISSN
1567-1739

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