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Effects of nitrogen incorporation on plasma erosion behaviors of oxynitride glasses

โœ Scribed by Jungki Lee; Seongjin Hwang; Sungmin Lee; Hyungsun Kim


Book ID
116672280
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
763 KB
Volume
356
Category
Article
ISSN
0022-3093

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