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Effects of plasma treatments on the nitrogen incorporated nanocrystalline diamond films

✍ Scribed by Jeedigunta, Sathyaharish; Xu, Zhenqing; Hirai, Makoto; Spagnol, Priscila; Kumar, Ashok

Book ID
122063591
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
713 KB
Volume
17
Category
Article
ISSN
0925-9635

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The influence of N 2 Plasma Immersion Ion Implantation (PIII) on undoped nanocrystalline diamond (NCD) films grown on silicon substrate by CVD process using a hot filament reactor was systematically studied. Before and after the implantation, NCD films were investigated using scanning electron micro