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Investigation of nitrogen addition on hydrogen incorporation in CVD diamond films from polycrystalline to nanocrystalline

✍ Scribed by Tang, C.J.; Abe, I.; Vieira, L.G.; Soares, M.J.; Grácio, J.; Pinto, J.L.


Book ID
122875248
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
366 KB
Volume
19
Category
Article
ISSN
0925-9635

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Role of oxygen additive on hydrogen impu
✍ Tang, C. J. ;Gu, L. P. ;Grácio, J. ;Ribeiro, J. L. 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 351 KB

## Abstract In this work, we study the influence of oxygen additive in the gas phase on hydrogen impurity incorporation into thick nanocrystalline diamond (NCD) films. Various diamond samples were grown on large silicon wafers of 5.08 cm diameter by adjusting the amount of oxygen and nitrogen addit