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Structural stability of ultrathin silicon oxynitride film improved by incorporated nitrogen

✍ Scribed by Masayuki Suzuki; Yoji Saito

Book ID: 108416282
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 276 KB
Volume: 173
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00548-1

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