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Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

✍ Scribed by L. Valentini; J.M. Kenny; R.M. Montereali; L. Lozzi; S. Santucci


Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
186 KB
Volume
5
Category
Article
ISSN
1369-8001

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