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Chemical Vapor Deposition of Silicon Oxynitride Films onto Silicon by the Pyrolysis of Hexamethyl Disilazane with Nitrogen-Containing Additives

✍ Scribed by O. N. Mittov; N. I. Ponomareva; I. Ya. Mittova; M. N. Bezryadin

Book ID: 110324274
Publisher: Springer
Year: 2002
Tongue: English
Weight: 60 KB
Volume: 31
Category: Article
ISSN: 1063-7397
DOI: 10.1023/a:1013800921927

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