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The effect of mercury UV photolysis on vapour deposition of SnO2

✍ Scribed by C.H. Lee; S.H. Liu


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
474 KB
Volume
219
Category
Article
ISSN
0040-6090

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The UV-induced photolysis of trimethyl(vinyloxy)silane (TMVSi) induced by ArF laser, affording a multitude of unsaturated hydrocarbons and a solid polydimethylsiloxane, represents a convenient process of chemical vapour deposition in which the silicon of the parent is almost completely utilized for