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The effect of ion beam mixing on SIMS depth resolution

✍ Scribed by J. Likonen; M. Hautala; I. Koponen


Book ID
113282918
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
394 KB
Volume
64
Category
Article
ISSN
0168-583X

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## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf

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## Abstract There are reports in the literature that crystal orientation is a major source of variation in sputter yields when examining biomineralized tissue material. To examine this further, single crystals of fluorapatite and calcite, both mineralogical analogues, were examined with two differe