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Effect of ion mixing on the depth resolution of sputter depth profiling

✍ Scribed by Cheng, Yang-Tse; Dow, Audrey A.; Clemens, Bruce M.

Book ID
120881301
Publisher
American Institute of Physics
Year
1988
Tongue
English
Weight
584 KB
Volume
53
Category
Article
ISSN
0003-6951

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Influence of ion mixing, ion beam-induce
Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces
✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf