The ultimate depth resolution in SIMS profiling: low-energy ion beam mixing of AuPt interface

✍ Scribed by J. Likonen; M. Hautala; I. Koponen

• Book ID: 113284643
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 379 KB
• Volume: 80-81
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(93)96096-u